Inventor

YAMAJI KANAME

JP2 patents

⚠️ This page may combine multiple inventors who share the name “YAMAJI KANAME”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7738983B2Jun 15, 2010

Method of optimizing process recipe of substrate processing system

TOKYO ELECTRON LTD16 citations81

YAMAJI KANAME

1 patent

US8082054B2Dec 20, 2011

Method of optimizing process recipe of substrate processing system

YAMAJI KANAME5 citations55