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Inventor
LEE WEON-MOOK
KR
3 patents
⚠️ This page may combine multiple inventors who share the name “LEE WEON-MOOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEE WEON-MOOK
1 patent
US8123903B2
Feb 28, 2012
Plasma reactor having multiple antenna structure
LEE WEON-MOOK
2 citations
48
DMS CO LTD
1 patent
US8049872B2
Nov 1, 2011
Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method
DMS CO LTD
1 citations
46
PARK KUN JOO
1 patent
US8223329B2
Jul 17, 2012
Endpoint detection device for realizing real-time control of plasma reactor, plasma reactor with endpoint detection device, and endpoint detection method
PARK KUN JOO
1 citations
40