Inventor
SAKAMOTO YUICHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SAKAMOTO YUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS8904957B2Dec 9, 2014
Plasma processor and plasma processing method
TOKYO ELECTRON LTD12 citations91
US7655570B2Feb 2, 2010
Etching method, program, computer readable storage medium and plasma processing apparatus
TOKYO ELECTRON LTD10 citations84
US9728381B2Aug 8, 2017
Plasma processor and plasma processing method
TOKYO ELECTRON LTD4 citations83
US9437402B2Sep 6, 2016
Plasma processor and plasma processing method
TOKYO ELECTRON LTD11 citations83
US7794617B2Sep 14, 2010
Plasma etching method, plasma processing apparatus, control program and computer readable storage medium
TOKYO ELECTRON LTD6 citations62