Inventor

GE LILI

CN2 patents

Patents

2 patents

US9964864B2May 8, 2018

Silicon wafer edge protection device

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations42

US10353297B2Jul 16, 2019

Moving platform device, exposure device and lithography machine

SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations30