Inventor
WANG SHIH-CHI
TW12 patents
⚠️ This page may combine multiple inventors who share the name “WANG SHIH-CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8945803B2Feb 3, 2015
Smart subfield method for E-beam lithography
TAIWAN SEMICONDUCTOR MFG26 citations92
US9390891B2Jul 12, 2016
Apparatus for charged particle lithography system
TAIWAN SEMICONDUCTOR MFG2 citations62
US8877410B2Nov 4, 2014
Data process for E-beam lithography
TAIWAN SEMICONDUCTOR MFG0 citations51