Inventor
TAKEHISA KIWAMU
JP26 patents
⚠️ This page may combine multiple inventors who share the name “TAKEHISA KIWAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LASERTEC CORP
9 patentsUS9719859B2Aug 1, 2017
Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams
LASERTEC CORP3 citations73
US9588421B2Mar 7, 2017
Pellicle inspection apparatus
LASERTEC CORP6 citations71
US10319088B2Jun 11, 2019
Inspection apparatus of EUV mask and its focus adjustment method
LASERTEC CORP5 citations70
US7764414B2Jul 27, 2010
Illumination apparatus and illumination method
LASERTEC CORP2 citations62
US7796343B2Sep 14, 2010
Photomask inspection apparatus
LASERTEC CORP2 citations59
US10706527B2Jul 7, 2020
Correction method, correction apparatus, and inspection apparatus
LASERTEC CORP1 citations56
US9991670B2Jun 5, 2018
Laser light source device and inspection device
LASERTEC CORP1 citations51
US10156664B2Dec 18, 2018
Mask inspection apparatus and mask inspection method
LASERTEC CORP0 citations39
US10801967B2Oct 13, 2020
Mask inspection apparatus, switching method, and mask inspection method
LASERTEC CORP0 citations34
KOMATSU MFG CO LTD
6 patentsUS6839373B1Jan 4, 2005
Ultra-narrow band flourine laser apparatus
KOMATSU MFG CO LTD24 citations89
US6628682B1Sep 30, 2003
Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus
KOMATSU MFG CO LTD15 citations81
US6594291B1Jul 15, 2003
Ultra narrow band fluorine laser apparatus and fluorine exposure apparatus
KOMATSU MFG CO LTD4 citations62
US6560269B1May 6, 2003
Fluorine laser device
KOMATSU MFG CO LTD3 citations62
US6819699B1Nov 16, 2004
Arf excimer laser device, scanning type exposure device and ultraviolet laser device
KOMATSU MFG CO LTD5 citations61
US7099365B2Aug 29, 2006
Oscillation method and device of fluorine molecular laser
KOMATSU MFG CO LTD1 citations45
TAKEHISA KIWAMU
5 patentsUS10305246B1May 28, 2019
Iodine laser based defense system
TAKEHISA KIWAMU0 citations50
US9583908B2Feb 28, 2017
Pulsed iodine laser apparatus
TAKEHISA KIWAMU0 citations50
US9350137B1May 24, 2016
Laser processing method and laser processing system
TAKEHISA KIWAMU0 citations50
US9142934B2Sep 22, 2015
Oxygen laser oscillator
TAKEHISA KIWAMU0 citations50
US9209594B2Dec 8, 2015
Oxygen laser oscillator
TAKEHISA KIWAMU0 citations39