P

Inventor

STANKE FRED

US5 patents
⚠️ This page may combine multiple inventors who share the name “STANKE FRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US7924422B2Apr 12, 2011

Calibration method for optical metrology

TOKYO ELECTRON LTD5 citations60
US7446887B2Nov 4, 2008

Matching optical metrology tools using hypothetical profiles

TOKYO ELECTRON LTD2 citations59
US7446888B2Nov 4, 2008

Matching optical metrology tools using diffraction signals

TOKYO ELECTRON LTD6 citations59

NORTON ADAM

1 patent
US8107073B2Jan 31, 2012

Diffraction order sorting filter for optical metrology

NORTON ADAM2 citations54

KLA TENCOR CORP

1 patent
US9619878B2Apr 11, 2017

Inspecting high-resolution photolithography masks

KLA TENCOR CORP0 citations41