Inventor
ALLES DAVID
US11 patents
⚠️ This page may combine multiple inventors who share the name “ALLES DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS7738093B2Jun 15, 2010
Methods for detecting and classifying defects on a reticle
KLA TENCOR CORP42 citations89
US9348214B2May 24, 2016
Spectral purity filter and light monitor for an EUV reticle inspection system
KLA TENCOR CORP2 citations61
US8772731B2Jul 8, 2014
Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool
KLA TENCOR CORP2 citations61
US7926959B1Apr 19, 2011
Beam conditioning to reduce spatial coherence
KLA TENCOR CORP1 citations50
US9619878B2Apr 11, 2017
Inspecting high-resolution photolithography masks
KLA TENCOR CORP0 citations41
KLA TENCOR TECH CORP
3 patentsUS7379175B1May 27, 2008
Methods and systems for reticle inspection and defect review using aerial imaging
KLA TENCOR TECH CORP99 citations97
US7123356B1Oct 17, 2006
Methods and systems for inspecting reticles using aerial imaging and die-to-database detection
KLA TENCOR TECH CORP126 citations97
US7027143B1Apr 11, 2006
Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths
KLA TENCOR TECH CORP107 citations97