Inventor
DAVYDENKO VLADIMIR
DE22 patents
⚠️ This page may combine multiple inventors who share the name “DAVYDENKO VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
13 patentsUS9280060B2Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH5 citations82
US7995280B2Aug 9, 2011
Projection exposure system, beam delivery system and method of generating a beam of light
ZEISS CARL SMT GMBH14 citations80
US9910360B2Mar 6, 2018
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
ZEISS CARL SMT GMBH2 citations72
US9535210B2Jan 3, 2017
Optical hollow waveguide assembly
ZEISS CARL SMT GMBH2 citations72
US9500954B2Nov 22, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH3 citations71
US8004656B2Aug 23, 2011
Illumination system for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH5 citations63
US9606441B2Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH1 citations61
US10274828B2Apr 30, 2019
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
ZEISS CARL SMT GMBH0 citations51
US10088754B2Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH0 citations50
US9910359B2Mar 6, 2018
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations50
US9310690B2Apr 12, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations50
US10539883B2Jan 21, 2020
Illumination system of a microlithographic projection device and method for operating such a system
ZEISS CARL SMT GMBH0 citations41
US9977334B2May 22, 2018
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
ZEISS CARL SMT GMBH0 citations41
Scantinel Photonics GmbH
5 patentsUS11009593B1May 18, 2021
Device and method for scanning measurement of the distance to an object
Scantinel Photonics GmbH4 citations71
US11237254B2Feb 1, 2022
Device and method for scanning measurement of the distance to an object
Scantinel Photonics GmbH0 citations60
US12578438B2Mar 17, 2026
Device and method for scanning frequency-modulated continuous-wave LiDAR range measurement
Scantinel Photonics GmbH0 citations50
US12377877B2Aug 5, 2025
Device and method for scanning measurement of the distance to an object
Scantinel Photonics GmbH0 citations50
US12111396B2Oct 8, 2024
Device and method for scanning frequency-modulated continuous wave (FMCW) LiDAR range measurement
Scantinel Photonics GmbH0 citations39