P

Inventor

DAVYDENKO VLADIMIR

DE22 patents
⚠️ This page may combine multiple inventors who share the name “DAVYDENKO VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

13 patents
US9280060B2Mar 8, 2016

Illumination system for microlithography

ZEISS CARL SMT GMBH5 citations82
US7995280B2Aug 9, 2011

Projection exposure system, beam delivery system and method of generating a beam of light

ZEISS CARL SMT GMBH14 citations80
US9910360B2Mar 6, 2018

Lighting system of a microlithographic projection exposure system and method for operating such a lighting system

ZEISS CARL SMT GMBH2 citations72
US9535210B2Jan 3, 2017

Optical hollow waveguide assembly

ZEISS CARL SMT GMBH2 citations72
US9500954B2Nov 22, 2016

Illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH3 citations71
US8004656B2Aug 23, 2011

Illumination system for a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH5 citations63
US9606441B2Mar 28, 2017

Illumination system for microlithography

ZEISS CARL SMT GMBH1 citations61
US10274828B2Apr 30, 2019

Lighting system of a microlithographic projection exposure system and method for operating such a lighting system

ZEISS CARL SMT GMBH0 citations51
US10088754B2Oct 2, 2018

Illumination system for microlithography

ZEISS CARL SMT GMBH0 citations50
US9910359B2Mar 6, 2018

Illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH0 citations50
US9310690B2Apr 12, 2016

Illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH1 citations50
US10539883B2Jan 21, 2020

Illumination system of a microlithographic projection device and method for operating such a system

ZEISS CARL SMT GMBH0 citations41
US9977334B2May 22, 2018

Lighting system of a microlithographic projection exposure system and method for operating such a lighting system

ZEISS CARL SMT GMBH0 citations41

Scantinel Photonics GmbH

5 patents

(unassigned)

1 patent

SCHOLZ AXEL

1 patent

FIOLKA DAMIAN

1 patent

ZEISS CARL AG

1 patent