Inventor
HILT STEFANIE
DE5 patents
Patents
5 patentsUS10444631B2Oct 15, 2019
Method of operating a microlithographic projection apparatus and illumination system of such an apparatus
ZEISS CARL SMT GMBH2 citations72
US9500954B2Nov 22, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH3 citations71
US9910359B2Mar 6, 2018
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations50
US9310690B2Apr 12, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations50
US9753375B2Sep 5, 2017
Illumination optical unit for projection lithography
ZEISS CARL SMT GMBH0 citations40