Inventor
KURATOMI KAZUNORI
JP4 patents
Patents
4 patentsUS10424499B2Sep 24, 2019
Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
TOKYO ELECTRON LTD2 citations69
US9627237B2Apr 18, 2017
Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
TOKYO ELECTRON LTD4 citations69
US9627238B2Apr 18, 2017
Substrate transfer apparatus, substrate transfer method, and storage medium
TOKYO ELECTRON LTD4 citations68
US10128138B2Nov 13, 2018
Substrate transfer method and storage medium
TOKYO ELECTRON LTD0 citations48