Inventor

MATSUZAKI JUNSUKE

JP2 patents

Patents

2 patents

US10508332B2Dec 17, 2019

Film formation apparatus, film formation method, and manufacturing method of solar battery

ULVAC INC1 citations54

US11674217B2Jun 13, 2023

Method of manufacturing substrate with a transparent conductive film, manufacturing apparatus of substrate with transparent conductive film, substrate with transparent conductive film, and solar cell

ULVAC INC0 citations44