Inventor
FUNAKUBO TAKAO
JP8 patents
Patents
8 patentsUS10923332B2Feb 16, 2021
Plasma processing method
TOKYO ELECTRON LTD0 citations60
US10903085B2Jan 26, 2021
Method for etching organic region
TOKYO ELECTRON LTD1 citations60
US10861675B2Dec 8, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations49
US10734204B2Aug 4, 2020
Method for cleaning components of plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10626497B2Apr 21, 2020
Method for cleaning components of plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10204763B2Feb 12, 2019
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations49
US9653317B2May 16, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39
US9779962B2Oct 3, 2017
Plasma etching method
TOKYO ELECTRON LTD0 citations32