Inventor
LEATHERSICH JEFFREY M
US6 patents
⚠️ This page may combine multiple inventors who share the name “LEATHERSICH JEFFREY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AKOUSTIS INC
4 patentsUS12102010B2Sep 24, 2024
Methods of forming films including scandium at low temperatures using chemical vapor deposition to provide piezoelectric resonator devices and/or high electron mobility transistor devices
AKOUSTIS INC0 citations59
US11832521B2Nov 28, 2023
Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers
AKOUSTIS INC0 citations59
US11856858B2Dec 26, 2023
Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films
AKOUSTIS INC1 citations58
US11618968B2Apr 4, 2023
Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers
AKOUSTIS INC0 citations48
AKOUSTIS TECH CORP
2 patentsUS12597906B2Apr 7, 2026
Doped crystalline piezoelectric resonator films and methods of forming doped single crystalline piezoelectric resonator layers on substrates via epitaxy
AKOUSTIS TECH CORP0 citations59
US12549150B2Feb 10, 2026
Methods of forming epitaxial AlScN resonators with superlattice structures including AlGaN interlayers and varied scandium concentrations for stress control and related structures
AKOUSTIS TECH CORP0 citations58