Inventor
ZHANG TONGWEN
CN4 patents
Patents
4 patentsUS11699541B2Jul 11, 2023
Magnetic thin film laminated structure deposition method
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations71
US12424363B2Sep 23, 2025
Magnetic thin film laminated structure and micro-inductive device thereof
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations61
US10854434B2Dec 1, 2020
Magnetron, magnetron sputtering chamber, and magnetron sputtering apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations58
US10622145B2Apr 14, 2020
Magnetic thin film deposition chamber and thin film deposition apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations40