Inventor
WU JUI-PIN
TW3 patents
Patents
3 patentsUS11720035B2Aug 8, 2023
Mitigating long-term energy decay of laser devices
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12147166B2Nov 19, 2024
Mitigating long-term energy decay of laser devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11506986B2Nov 22, 2022
Thermal controlling method in lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50