Inventor

KEDLAYA DIWAKAR

US22 patents

⚠️ This page may combine multiple inventors who share the name “KEDLAYA DIWAKAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KEDLAYA DIWAKAR

APPLIED MATERIALS INC

Methods to reduce material surface roughness

Multiple spacer patterning schemes

Backside gas leakby for bevel deposition reduction

Boron concentration tunability in boron-silicon films

Boron concentration tunability in boron-silicon films

Methods to reduce material surface roughness

Controlling concentration profiles for deposited films using machine learning

Multiple spacer patterning schemes

Systems and methods for substrate support temperature control

Hydrogen management in plasma deposited films

Processing systems and methods to control process drift

Cover wafer for semiconductor processing chamber

Controlling concentration profiles for deposited films using machine learning

Optical absorption sensor for semiconductor processing

Faceplate having blocked center hole

Gas delivery systems and methods

Faceplate with edge flow control

Throttle valve and foreline cleaning using a microwave source

Methods to eliminate of deposition on wafer bevel and backside

Gas mixer to enable RPS purging

Chamber components for gas delivery modulation

ANVIK CORP

Vacuum debris removal system