Inventor
PARIMI VENKATA SHARAT CHANDRA
US21 patents
Patents
21 patentsUS11600470B2Mar 7, 2023
Targeted heat control systems
APPLIED MATERIALS INC2 citations71
US11495483B2Nov 8, 2022
Backside gas leakby for bevel deposition reduction
APPLIED MATERIALS INC2 citations71
US12000048B2Jun 4, 2024
Pedestal for substrate processing chambers
APPLIED MATERIALS INC0 citations62
US11584994B2Feb 21, 2023
Pedestal for substrate processing chambers
APPLIED MATERIALS INC1 citations62
US12211673B2Jan 28, 2025
Processing chamber deposition confinement
APPLIED MATERIALS INC0 citations61
US12211728B2Jan 28, 2025
Electrostatic chuck design with improved chucking and arcing performance
APPLIED MATERIALS INC0 citations61
US11682574B2Jun 20, 2023
Electrostatic chuck design with improved chucking and arcing performance
APPLIED MATERIALS INC0 citations61
US11515129B2Nov 29, 2022
Radiation shield modification for improving substrate temperature uniformity
APPLIED MATERIALS INC0 citations61
US11984305B2May 14, 2024
Substrate pedestal for improved substrate processing
APPLIED MATERIALS INC0 citations60
US11587773B2Feb 21, 2023
Substrate pedestal for improved substrate processing
APPLIED MATERIALS INC0 citations60
US10923334B2Feb 16, 2021
Selective deposition of hardmask
APPLIED MATERIALS INC0 citations60
US11821082B2Nov 21, 2023
Reduced defect deposition processes
APPLIED MATERIALS INC0 citations56
US12100609B2Sep 24, 2024
Electrostatic chucking process
APPLIED MATERIALS INC0 citations51
US12191115B2Jan 7, 2025
Dual RF for controllable film deposition
APPLIED MATERIALS INC0 citations50
US11830706B2Nov 28, 2023
Heated pedestal design for improved heat transfer and temperature uniformity
APPLIED MATERIALS INC0 citations50
US11682544B2Jun 20, 2023
Cover wafer for semiconductor processing chamber
APPLIED MATERIALS INC0 citations50
US12027366B2Jul 2, 2024
Reduced hydrogen deposition processes
APPLIED MATERIALS INC0 citations48
US12255054B2Mar 18, 2025
Methods to eliminate of deposition on wafer bevel and backside
APPLIED MATERIALS INC0 citations47
US11862475B2Jan 2, 2024
Gas mixer to enable RPS purging
APPLIED MATERIALS INC0 citations46
US12191169B2Jan 7, 2025
Systems and methods for faceplate temperature control
APPLIED MATERIALS INC0 citations44
US11804363B2Oct 31, 2023
Chamber components for gas delivery modulation
APPLIED MATERIALS INC0 citations44