Inventor
NARAYANAN RAJARAM
US5 patents
Patents
5 patentsUS12362181B2Jul 15, 2025
Methods of forming thermally stable carbon film
APPLIED MATERIALS INC0 citations61
US12564021B2Feb 24, 2026
Method of processing a substrate
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US11798820B2Oct 24, 2023
Gas delivery systems and methods
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US11810764B2Nov 7, 2023
Faceplate with edge flow control
APPLIED MATERIALS INC0 citations48
US11862475B2Jan 2, 2024
Gas mixer to enable RPS purging
APPLIED MATERIALS INC0 citations46