Inventor
CHOUDHURY RUPANKAR
IN8 patents
Patents
8 patentsUS10388549B2Aug 20, 2019
On-board metrology (OBM) design and implication in process tool
APPLIED MATERIALS INC8 citations79
US11326256B2May 10, 2022
Dome stress isolating layer
APPLIED MATERIALS INC0 citations56
US10510567B2Dec 17, 2019
Integrated substrate temperature measurement on high temperature ceramic heater
APPLIED MATERIALS INC0 citations50
US11862475B2Jan 2, 2024
Gas mixer to enable RPS purging
APPLIED MATERIALS INC0 citations46
US10858735B2Dec 8, 2020
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46
US10435786B2Oct 8, 2019
Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods
APPLIED MATERIALS INC0 citations46
US11610800B2Mar 21, 2023
Capacitive method of detecting wafer chucking and de-chucking
APPLIED MATERIALS INC0 citations41
US12586767B2Mar 24, 2026
Multi-port cross flow system
APPLIED MATERIALS INC0 citations39