Inventor
OKU NOBUO
JP3 patents
Patents
3 patentsUS12136548B2Nov 5, 2024
Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device
JSW AKTINA SYSTEM CO LTD0 citations59
US11894229B2Feb 6, 2024
Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device
JSW AKTINA SYSTEM CO LTD0 citations59
US12562543B2Feb 24, 2026
Laser irradiation apparatus, laser irradiation method, and recording medium recording program to be readable
JSW AKTINA SYSTEM CO LTD0 citations53