Inventor

EVA ERIC

DE20 patents

⚠️ This page may combine multiple inventors who share the name “EVA ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EVA ERIC

ZEISS CARL SMT GMBH

Substrate for a reflective optical element

Optical element and lithography system

Optical manipulator, projection lens and projection exposure apparatus

Method for loading a blank composed of fused silica with hydrogen, lens element and projection lens

Method for repairing reflective optical elements for EUV lithography

Reflective optical element for EUV lithography

Method for producing a mirror of a microlithographic projection exposure apparatus

Component for a mirror array for EUV lithography

Method and apparatus for determining the absorption in a blank

Method for manufacturing a lens of synthetic quartz glass with increased H2 content

ZEISS CARL SMT AG

Attenuating filter for ultraviolet light

Method and apparatus for setting optical imaging properties by means of radiation treatment

Lens blank and lens elements as well as method for their production

Projection optical system

Optical composite material and method for its production

EVA ERIC

Optical element and method

Optical element and method

Lens blank and lens elements as well as method for their production

Lens blank and lens elements as well as method for their production

SCHOTT GLAS

Method of making a fracture-resistant calcium fluoride single crystal and its use