Inventor
PUDAS MARKO
FI18 patents
Patents
18 patentsUS11761082B2Sep 19, 2023
ALD apparatus, method and valve
PICOSUN OY3 citations71
US10982325B2Apr 20, 2021
Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
PICOSUN OY5 citations69
US11447867B2Sep 20, 2022
Coating of 3-dimensional substrates
PICOSUN OY2 citations67
US12351915B2Jul 8, 2025
Porous inlet
PICOSUN OY1 citations63
US12297535B2May 13, 2025
Substrate processing methods and apparatus
PICOSUN OY0 citations61
US11668005B2Jun 6, 2023
Manufacturing of coated items
PICOSUN OY0 citations61
US12460297B2Nov 4, 2025
ALD apparatus, method and valve
PICOSUN OY0 citations60
US12110588B2Oct 8, 2024
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US11976989B2May 7, 2024
Sensor and its manufacturing method
PICOSUN OY0 citations60
US11668004B2Jun 6, 2023
Substrate coating
PICOSUN OY0 citations60
US11505864B2Nov 22, 2022
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US11477894B2Oct 18, 2022
Method for formation of patterned solder mask
PICOSUN OY0 citations60
US11261526B2Mar 1, 2022
Particle coating
PICOSUN OY0 citations60
US11241316B2Feb 8, 2022
Implant coating
PICOSUN OY0 citations60
US12065730B2Aug 20, 2024
Coating of fluid-permeable materials
PICOSUN OY0 citations50
US11759100B2Sep 19, 2023
Method and apparatus for cleaning medical instruments and for detecting residue thereon
PICOSUN OY0 citations50
US10600058B2Mar 24, 2020
Anti-counterfeit signature
PICOSUN OY0 citations50
US11992425B2May 28, 2024
Spring loaded medical device
PICOSUN OY0 citations49