Inventor

HIRANO MITSUHIRO

JP10 patents

⚠️ This page may combine multiple inventors who share the name “HIRANO MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CO LTD

5 patents

US5810538ASep 22, 1998

Semiconductor manufacturing equipment and method for carrying wafers in said equipment

KOKUSAI ELECTRIC CO LTD50 citations92

US6264706B1Jul 24, 2001

Substrate processing apparatus with local exhaust for removing contaminants

KOKUSAI ELECTRIC CO LTD25 citations91

US5277215AJan 11, 1994

Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same

KOKUSAI ELECTRIC CO LTD27 citations87

US6332898B1Dec 25, 2001

Substrate processing apparatus and maintenance method therefor

KOKUSAI ELECTRIC CO LTD6 citations72

US6143040ANov 7, 2000

Substrate processing apparatus and maintenance method therefor

KOKUSAI ELECTRIC CO LTD13 citations72

TAKESHITA MITSUNORI

1 patent

US9111972B2Aug 18, 2015

Substrate processing apparatus and manufacturing method for a semiconductor device

TAKESHITA MITSUNORI443 citations96

HITACHI LTD

1 patent

US7660753B2Feb 9, 2010

Inventory control system, inventory control method, fee collection method utilized in inventory control system, inventory control program, and storage medium

HITACHI LTD8 citations83

FUJITSU MICROELECTRONICS LTD

1 patent

US7516383B2Apr 7, 2009

Method and apparatus for analyzing delay in circuit, and computer product

FUJITSU MICROELECTRONICS LTD9 citations82

HITACHI INT ELECTRIC INC

1 patent

US10604839B2Mar 31, 2020

Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate

HITACHI INT ELECTRIC INC1 citations61

FUJITSU SEMICONDUCTOR LTD

1 patent

US8816759B2Aug 26, 2014

Electric circuit and semiconductor device

FUJITSU SEMICONDUCTOR LTD0 citations40