Inventor

MARUBAYASHI TETSUYA

JP6 patents

⚠️ This page may combine multiple inventors who share the name “MARUBAYASHI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CO LTD

2 patents

US6332898B1Dec 25, 2001

Substrate processing apparatus and maintenance method therefor

KOKUSAI ELECTRIC CO LTD6 citations72

US6143040ANov 7, 2000

Substrate processing apparatus and maintenance method therefor

KOKUSAI ELECTRIC CO LTD13 citations72

KOKUSAI ELECTRIC CORP

2 patents

USD997892SSep 5, 2023

End effector for handling wafers

KOKUSAI ELECTRIC CORP5 citations69

US11359283B2Jun 14, 2022

Reaction tube structure and substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations48

MARUBAYASHI TETSUYA

1 patent

US8070880B2Dec 6, 2011

Substrate processing apparatus

MARUBAYASHI TETSUYA11 citations78

MORIYA ATSUSHI

1 patent

US8071477B2Dec 6, 2011

Method of manufacturing semiconductor device and substrate processing apparatus

MORIYA ATSUSHI6 citations59