Inventor
MERKLING JR ROBERT M
US4 patents
Patents
4 patentsUS4528066AJul 9, 1985
Selective anisotropic reactive ion etching process for polysilicide composite structures
IBM93 citations94
US7056192B2Jun 6, 2006
Ceria-based polish processes, and ceria-based slurries
IBM45 citations88
US6227948B1May 8, 2001
Polishing pad reconditioning via polishing pad material as conditioner
IBM13 citations72
US6102776AAug 15, 2000
Apparatus and method for controlling polishing of integrated circuit substrates
IBM15 citations72