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Inventor
PEACOCK MICHAEL A
US
2 patents
Patents
2 patents
US6180952B1
Jan 30, 2001
Holder assembly system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST
16 citations
89
US6353232B2
Mar 5, 2002
Holder assembly system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST
5 citations
70