Inventor

UCHINO TOSHIYUKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “UCHINO TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

1 patent

US5001327AMar 19, 1991

Apparatus and method for performing heat treatment on semiconductor wafers

HITACHI LTD146 citations95

KOKUSAI ELECTRIC CO LTD

1 patent

US6462411B1Oct 8, 2002

Semiconductor wafer processing apparatus for transferring a wafer mount

KOKUSAI ELECTRIC CO LTD40 citations90

RENESAS TECH CORP

1 patent

US7098156B2Aug 29, 2006

Method of fabrication of semiconductor integrated circuit device

RENESAS TECH CORP0 citations39