Inventor
IKEDA FUMIHIDE
JP10 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA FUMIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CO LTD
9 patentsUS5387265AFeb 7, 1995
Semiconductor wafer reaction furnace with wafer transfer means
KOKUSAI ELECTRIC CO LTD408 citations97
US5705224AJan 6, 1998
Vapor depositing method
KOKUSAI ELECTRIC CO LTD126 citations95
US6217663B1Apr 17, 2001
Substrate processing apparatus and substrate processing method
KOKUSAI ELECTRIC CO LTD69 citations94
US6332927B1Dec 25, 2001
Substrate processing apparatus
KOKUSAI ELECTRIC CO LTD20 citations92
US6139641AOct 31, 2000
Substrate processing apparatus having a gas heating tube
KOKUSAI ELECTRIC CO LTD21 citations92
US5960159ASep 28, 1999
Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety
KOKUSAI ELECTRIC CO LTD37 citations91
US6462411B1Oct 8, 2002
Semiconductor wafer processing apparatus for transferring a wafer mount
KOKUSAI ELECTRIC CO LTD40 citations90
US6132553AOct 17, 2000
Substrate processing apparatus
KOKUSAI ELECTRIC CO LTD17 citations83
US6270581B1Aug 7, 2001
Wet-oxidation apparatus and wet-oxidation method
KOKUSAI ELECTRIC CO LTD12 citations73