Inventor
CHEN JIA-RONG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JIA-RONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6110232AAug 29, 2000
Method for preventing corrosion in load-lock chambers
TAIWAN SEMICONDUCTOR MFG55 citations91
US6170496B1Jan 9, 2001
Apparatus and method for servicing a wafer platform
TAIWAN SEMICONDUCTOR MFG33 citations87
US6002516ADec 14, 1999
Vertical cassette elevator and load lock viewer
TAIWAN SEMICONDUCTOR MFG1 citations48
US7033442B2Apr 25, 2006
System and method for ventilation in the fabrication of integrated circuits
TAIWAN SEMICONDUCTOR MFG1 citations41