Inventor
PETRUS JOHN CHARLES
US4 patents
Patents
4 patentsUS7105391B2Sep 12, 2006
Planar pedestal multi gate device
IBM12 citations83
US7008803B2Mar 7, 2006
Method of reworking structures incorporating low-k dielectric materials
IBM14 citations78
US6881955B2Apr 19, 2005
Metrology process for enhancing image contrast
IBM10 citations71
US7541277B1Jun 2, 2009
Stress relaxation, selective nitride phase removal
IBM2 citations61