Inventor
DULAY SUKHBIR SINGH
US3 patents
Patents
3 patentsUS7186574B2Mar 6, 2007
CMP process metrology test structures
HITACHI GLOBAL STORAGE TECH5 citations58
US7454828B2Nov 25, 2008
Method for manufacturing a magnetic write head
HITACHI GLOBAL STORAGE TECH2 citations57
US7323350B2Jan 29, 2008
Method of fabricating thin film calibration features for electron/ion beam image based metrology
HITACHI GLOBAL STORAGE TECH3 citations57