Inventor

BOOGAARTS MARTINUS GODEFRIDUS

NL2 patents

Patents

2 patents

US7193722B2Mar 20, 2007

Lithographic apparatus with disturbance correction system and device manufacturing method

ASML NETHERLANDS BV12 citations82

US7227614B2Jun 5, 2007

Measurement method, device manufacturing method and lithographic apparatus

ASML NETHERLANDS BV3 citations58