Inventor
LIM CHANG MOON
KR17 patents
⚠️ This page may combine multiple inventors who share the name “LIM CHANG MOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
12 patentsUS7303858B2Dec 4, 2007
Photoacid generating polymer, its preparation method, top anti-reflective coating composition comprising the same, method of forming a pattern in a semiconductor device, and semiconductor device
HYNIX SEMICONDUCTOR INC9 citations73
US7553771B2Jun 30, 2009
Method of forming pattern of semiconductor device
HYNIX SEMICONDUCTOR INC7 citations72
US7915113B2Mar 29, 2011
Semiconductor device and method for manufacturing the same
HYNIX SEMICONDUCTOR INC2 citations62
US7534548B2May 19, 2009
Polymer for immersion lithography and photoresist composition
HYNIX SEMICONDUCTOR INC2 citations62
US7462439B2Dec 9, 2008
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same
HYNIX SEMICONDUCTOR INC3 citations62
US7381519B2Jun 3, 2008
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same
HYNIX SEMICONDUCTOR INC4 citations62
US7288364B2Oct 30, 2007
Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same
HYNIX SEMICONDUCTOR INC3 citations62
US7838201B2Nov 23, 2010
Method for manufacturing a semiconductor device
HYNIX SEMICONDUCTOR INC0 citations52
US7571424B2Aug 4, 2009
Diffused aerial image model semiconductor device fabrication
HYNIX SEMICONDUCTOR INC2 citations51
US7008734B2Mar 7, 2006
Phase shift mask
HYNIX SEMICONDUCTOR INC0 citations50
US7629595B2Dec 8, 2009
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC0 citations41
US7419760B2Sep 2, 2008
Top anti-reflective coating composition, method for forming the pattern of a semiconductor device using the same, and semiconductor device comprising the pattern
HYNIX SEMICONDUCTOR INC0 citations41
SK HYNIX INC
3 patentsUS8906584B2Dec 9, 2014
Photomask and method for forming pattern of semiconductor device using the same
SK HYNIX INC0 citations51
US9612524B2Apr 4, 2017
Reflective mask and method of fabricating the same
SK HYNIX INC0 citations49
US9105655B2Aug 11, 2015
Semiconductor device and method for manufacturing the same
SK HYNIX INC0 citations41