Inventor
BEHM GARY W
US13 patents
⚠️ This page may combine multiple inventors who share the name “BEHM GARY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS7778112B2Aug 17, 2010
Apparatus and method for sensing of three-dimensional environmental information
IBM32 citations89
US7113845B1Sep 26, 2006
Integration of factory level and tool level advanced process control systems
IBM16 citations82
US7398172B2Jul 8, 2008
Method and system of providing a dynamic sampling plan for integrated metrology
IBM5 citations68
US7899566B2Mar 1, 2011
Factory level and tool level advanced process control systems integration implementation
IBM2 citations60
US7489980B2Feb 10, 2009
Factory level and tool level advanced process control systems integration implementation
IBM5 citations60
US7509186B2Mar 24, 2009
Method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing process
IBM2 citations56
US7895008B2Feb 22, 2011
Method of performing measurement sampling of lots in a manufacturing process
IBM1 citations51
US7577537B2Aug 18, 2009
Providing a dynamic sampling plan for integrated metrology
IBM1 citations47
BEHM GARY W
5 patentsUS8842021B2Sep 23, 2014
Methods and systems for early warning detection of emergency vehicles
BEHM GARY W39 citations90
US8077020B2Dec 13, 2011
Method and apparatus for tactile haptic device to guide user in real-time obstacle avoidance
BEHM GARY W17 citations80
US8229691B2Jul 24, 2012
Method for using real-time APC information for an enhanced lot sampling engine
BEHM GARY W6 citations71
US8130262B2Mar 6, 2012
Apparatus and method for enhancing field of vision of the visually impaired
BEHM GARY W3 citations58
US8565910B2Oct 22, 2013
Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process
BEHM GARY W1 citations51