Inventor · disambiguated record
Emily M. Hwang
Also filed as: HWANG EMILY M
5 granted patents·29 citations·filing 2005–2009
77Inventor score
Files withIBM5
Top patents by PatentIndex Score
5 records- 0184US7113845B1Integration of factory level and tool level advanced process control systemsIBM·Filed 2005·Granted Sep 26, 2006·16 cites·21 claims
- 0273US7489980B2Factory level and tool level advanced process control systems integration implementationIBM·Filed 2006·Granted Feb 10, 2009·5 cites·3 claims
- 0370US7899566B2Factory level and tool level advanced process control systems integration implementationIBM·Filed 2009·Granted Mar 1, 2011·2 cites·18 claims
- 0470US7398172B2Method and system of providing a dynamic sampling plan for integrated metrologyIBM·Filed 2006·Granted Jul 8, 2008·5 cites·8 claims
- 0555US7577537B2Providing a dynamic sampling plan for integrated metrologyIBM·Filed 2008·Granted Aug 18, 2009·1 cites·12 claims
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