Inventor
MAGTOTO TERESITA Q
US5 patents
Patents
5 patentsUS7113845B1Sep 26, 2006
Integration of factory level and tool level advanced process control systems
IBM16 citations82
US7398172B2Jul 8, 2008
Method and system of providing a dynamic sampling plan for integrated metrology
IBM5 citations68
US7899566B2Mar 1, 2011
Factory level and tool level advanced process control systems integration implementation
IBM2 citations60
US7489980B2Feb 10, 2009
Factory level and tool level advanced process control systems integration implementation
IBM5 citations60
US7577537B2Aug 18, 2009
Providing a dynamic sampling plan for integrated metrology
IBM1 citations47