Inventor
STOLL DEREK C
US3 patents
Patents
3 patentsUS7398172B2Jul 8, 2008
Method and system of providing a dynamic sampling plan for integrated metrology
IBM5 citations68
US7509186B2Mar 24, 2009
Method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing process
IBM2 citations56
US7577537B2Aug 18, 2009
Providing a dynamic sampling plan for integrated metrology
IBM1 citations47