Inventor
KOCHERSPERGER PETER
US12 patents
⚠️ This page may combine multiple inventors who share the name “KOCHERSPERGER PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
10 patentsUS7021120B2Apr 4, 2006
High resolution gas gauge proximity sensor
ASML HOLDING NV26 citations89
US6978658B1Dec 27, 2005
Proximity sensor with self compensation for mechanism instability
ASML HOLDING NV13 citations83
US7278817B2Oct 9, 2007
Method for transferring and loading a reticle
ASML HOLDING NV6 citations72
US7751130B2Jul 6, 2010
Optical element damping systems
ASML HOLDING NV5 citations62
US7542263B2Jun 2, 2009
Overlay correction by reducing wafer slipping after alignment
ASML HOLDING NV4 citations61
US7414701B2Aug 19, 2008
Method and systems for total focus deviation adjustments on maskless lithography systems
ASML HOLDING NV5 citations61
US7004715B2Feb 28, 2006
Apparatus for transferring and loading a reticle with a robotic reticle end-effector
ASML HOLDING NV3 citations61
US10209635B2Feb 19, 2019
Lithographic apparatus with a patterning device environment
ASML HOLDING NV1 citations60
US7500380B2Mar 10, 2009
Measuring distance using gas gauge proximity sensor
ASML HOLDING NV4 citations59
US7786607B2Aug 31, 2010
Overlay correction by reducing wafer slipping after alignment
ASML HOLDING NV0 citations51