Inventor · disambiguated record
Gregory Gibilaro
Also filed as: GIBILARO GREGORY · GIBILARO GREGORY R
3 granted patents·2 pending applications·20 citations·filing 2001–2016
66Inventor score
Technology areasH01J
Top patents by PatentIndex Score
5 records- 0170US7547460B2Ion implanter optimizer scan waveform retention and recoveryVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jun 16, 2009·10 cites·16 claims
- 0270US7442944B2Ion beam implant current, spot width and position tuningVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Oct 28, 2008·9 cites·25 claims
- 0366US9738968B2Apparatus and method for controlling implant processVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Aug 22, 2017·1 cites·18 claims
- 0435US2005133728A1Method and system for in-situ calibration of a dose controller for ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2003·Application pending·0 cites
- 0533US2002175297A1Methods and apparatus for ion implantation with variable spatial frequency scan linesFiled 2002·Application pending·0 cites
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