Inventor

EKBERG MATS

SE6 patents

⚠️ This page may combine multiple inventors who share the name “EKBERG MATS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRONIC LASER SYSTEMS AB

2 patents

US6883158B1Apr 19, 2005

Method for error reduction in lithography

MICRONIC LASER SYSTEMS AB130 citations96

US7923182B2Apr 12, 2011

Multi-focus method of enhanced three-dimensional exposure of resist

MICRONIC LASER SYSTEMS AB2 citations61

SANDSTROEM TORBJOERN

2 patents

US8067134B2Nov 29, 2011

Method of iterative compensation for non-linear effects in three-dimensional exposure of resist

SANDSTROEM TORBJOERN1 citations61

US8057971B2Nov 15, 2011

Method of compensation for bleaching of resist during three-dimensional exposure of resist

SANDSTROEM TORBJOERN0 citations51

ASEA BROWN BOVERI

1 patent

US6226163B1May 1, 2001

Device and method relating to protection of an object against over-currents comprising over-current reduction

ASEA BROWN BOVERI38 citations90

ABB AB

1 patent

US6263124B1Jul 17, 2001

Photoconductive switch

ABB AB4 citations59