P

Inventor

KONDO TOMOYASU

JP10 patents
⚠️ This page may combine multiple inventors who share the name “KONDO TOMOYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GONOHE NARISHI

4 patents
US8158197B2Apr 17, 2012

Method for forming tantalum nitride film

GONOHE NARISHI2 citations58
US8796142B2Aug 5, 2014

Method for forming tantalum nitride film

GONOHE NARISHI0 citations37
US8158198B2Apr 17, 2012

Method for forming tantalum nitride film

GONOHE NARISHI0 citations37
US8105468B2Jan 31, 2012

Method for forming tantalum nitride film

GONOHE NARISHI0 citations37

ULVAC CORP

3 patents
US6217730B1Apr 17, 2001

Sputtering device

ULVAC CORP27 citations90
US6413392B1Jul 2, 2002

Sputtering device

ULVAC CORP19 citations80
US6469448B2Oct 22, 2002

Inductively coupled RF plasma source

ULVAC CORP17 citations76

ULVAC INC

2 patents
US6706155B2Mar 16, 2004

Sputtering apparatus and film manufacturing method

ULVAC INC28 citations90
US8377269B2Feb 19, 2013

Sputtering apparatus

ULVAC INC1 citations48

MORIMOTO NAOKI

1 patent
US8470145B2Jun 25, 2013

Cathode unit and sputtering apparatus provided with the same

MORIMOTO NAOKI0 citations41