Inventor
NAGASHIMA HIDETO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “NAGASHIMA HIDETO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
6 patentsUS6706155B2Mar 16, 2004
Sputtering apparatus and film manufacturing method
ULVAC INC28 citations90
US11923178B2Mar 5, 2024
Vacuum processing apparatus
ULVAC INC0 citations50
US11549173B2Jan 10, 2023
Sputtering apparatus
ULVAC INC0 citations49
US8377269B2Feb 19, 2013
Sputtering apparatus
ULVAC INC1 citations48
US12112929B2Oct 8, 2024
Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus
ULVAC INC0 citations44
US11629400B2Apr 18, 2023
Sputtering target and method of producing the same
ULVAC INC0 citations42