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Inventor
SANO AKIFUMI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SANO AKIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
2 patents
US8377269B2
Feb 19, 2013
Sputtering apparatus
ULVAC INC
1 citations
48
US9337092B2
May 10, 2016
Method of manufacturing semiconductor device
ULVAC INC
0 citations
42
SAKAI CHEMICAL INDUSTRY CO
1 patent
US11033468B2
Jun 15, 2021
Liquid dispersion and uses thereof
SAKAI CHEMICAL INDUSTRY CO
0 citations
40