P

Inventor

MIYATA HIROMU

JP8 patents
⚠️ This page may combine multiple inventors who share the name “MIYATA HIROMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

6 patents
US9268219B2Feb 23, 2016

Photoresist composition and resist pattern-forming method

JSR CORP2 citations61
US9046765B2Jun 2, 2015

Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film

JSR CORP2 citations61
US8822140B2Sep 2, 2014

Resist pattern-forming method

JSR CORP0 citations51
US9229323B2Jan 5, 2016

Pattern-forming method

JSR CORP0 citations40
US9223207B2Dec 29, 2015

Resist pattern-forming method, and radiation-sensitive resin composition

JSR CORP0 citations40
US9760004B2Sep 12, 2017

Radiation-sensitive resin composition and resist pattern-forming method

JSR CORP0 citations39

NISHIMURA YUKIO

1 patent
US8124314B2Feb 28, 2012

Radiation-sensitive composition

NISHIMURA YUKIO4 citations57

SAKAKIBARA HIROKAZU

1 patent
US8530146B2Sep 10, 2013

Method for forming resist pattern

SAKAKIBARA HIROKAZU1 citations49