Inventor
ROH HYUN SOO
KR4 patents
⚠️ This page may combine multiple inventors who share the name “ROH HYUN SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHEIL IND INC
3 patentsUS7601273B2Oct 13, 2009
Polishing slurry composition and method of using the same
CHEIL IND INC8 citations79
US7534277B2May 19, 2009
Slurry composition for secondary polishing of silicon wafer
CHEIL IND INC4 citations56
US8828266B2Sep 9, 2014
CMP slurry composition and polishing method using the same
CHEIL IND INC0 citations49