Inventor

KINOSHITA SHIGEJI

JP3 patents

Patents

3 patents

US4358686ANov 9, 1982

Plasma reaction device

MITSUBISHI ELECTRIC CORP54 citations87

US4454166AJun 12, 1984

Process for preparing semiconductor device

MITSUBISHI ELECTRIC CORP8 citations72

US4535530AAug 20, 1985

Process for manufacturing a semiconductor memory device

MITSUBISHI ELECTRIC CORP10 citations69