Inventor
BANERJEE INDRAJIT
US6 patents
⚠️ This page may combine multiple inventors who share the name “BANERJEE INDRAJIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
3 patentsUS5946601AAug 31, 1999
Unique α-C:N:H/α-C:Nx film liner/barrier to prevent fluorine outdiffusion from α-FC chemical vapor deposition dielectric layers
INTEL CORP52 citations91
US6566757B1May 20, 2003
Stabilization of low dielectric constant film with in situ capping layer
INTEL CORP36 citations87
US6528865B1Mar 4, 2003
Thin amorphous fluorocarbon films
INTEL CORP15 citations81