Inventor
LERCEL MICHAEL JAMES
US6 patents
⚠️ This page may combine multiple inventors who share the name “LERCEL MICHAEL JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6498096B2Dec 24, 2002
Borderless contact to diffusion with respect to gate conductor and methods for fabricating
IBM62 citations94
US6215190B1Apr 10, 2001
Borderless contact to diffusion with respect to gate conductor and methods for fabricating
IBM18 citations89
US6610446B2Aug 26, 2003
Information storage on masks for microlithographic tools
IBM7 citations70
US7067220B2Jun 27, 2006
Pattern compensation techniques for charged particle lithographic masks
IBM0 citations51