Inventor
NAKOS JAMES SPIROS
US13 patents
⚠️ This page may combine multiple inventors who share the name “NAKOS JAMES SPIROS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS6498096B2Dec 24, 2002
Borderless contact to diffusion with respect to gate conductor and methods for fabricating
IBM62 citations94
US5828131AOct 27, 1998
Low temperature formation of low resistivity titanium silicide
IBM60 citations94
US6215190B1Apr 10, 2001
Borderless contact to diffusion with respect to gate conductor and methods for fabricating
IBM18 citations89
US6522304B2Feb 18, 2003
Dual damascene horn antenna
IBM19 citations83
US7897939B2Mar 1, 2011
Removable liners for charged particle beam systems
IBM7 citations80
US6187679B1Feb 13, 2001
Low temperature formation of low resistivity titanium silicide
IBM9 citations72
US7462845B2Dec 9, 2008
Removable liners for charged particle beam systems
IBM5 citations69
US8012848B2Sep 6, 2011
Trench isolation and method of fabricating trench isolation
IBM4 citations60
US7897940B2Mar 1, 2011
Removable liners for charged particle beam systems
IBM0 citations48
US7888142B2Feb 15, 2011
Copper contamination detection method and system for monitoring copper contamination
IBM1 citations45
US7737050B2Jun 15, 2010
Method of fabricating a nitrided silicon oxide gate dielectric layer
IBM0 citations40
US7957917B2Jun 7, 2011
Copper contamination detection method and system for monitoring copper contamination
IBM0 citations35